Analysis of a 3-DOF Micro-Positioning Stage

De De Zhai; Shi Xun Fan; Da Peng Fan

doi:10.4028/www.scientific.net/KEM.620.234

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 620Analysis of a 3-DOF Micro-Positioning Stage

Analysis of a 3-DOF Micro-Positioning Stage

Abstract:

Firstly a three degrees of freedom micro-positioning stage constructed by flexure hinges is designed, and the simplified model of the stage is established. Secondly, the stiffness of the stage along X, Y direction or around Z direction is deduced by structural mechanics. The difference between finite element method and theory value is less than 7%, so it shows the theory analysis is feasible, further more, stress of the moving stage is analyzed, and the effect curve of the key parameters to the stiffness and stress is obtained. It can be concluded that the stiffness and stress mainly related with the flexure hinge length L and width t, thus it provide a theoretical basis for three-dimensional micro-positioning stage design.

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Periodical:

Key Engineering Materials (Volume 620)

Pages:

234-239

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.620.234

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Online since:

August 2014

Authors:

De De Zhai, Shi Xun Fan, Da Peng Fan

Keywords:

Flexure Hinges, Simulation Analysis, Stiffness Analysis, Stress Analysis

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