Frictional Characteristics Measurement of a Ceramic Aerostatic Linear Bearing

Article Preview

Abstract:

The resultant force acting on the moving part of the ceramic aerostatic linear bearing is measured highly accurately as the inertial force of the moving part of the bearing by means of the levitation mass method (LMM). The measurement results of the ceramic aerostatic linear bearing and metal aerostatic linear bearing of different mass are compared. The regression equation of the ceramic aerostatic linear bearing and metal aerostatic linear bearing are calculated. The ceramic linear bearing and metal linear bearing have extremely small frictional force.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

167-172

Citation:

Online since:

May 2015

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2015 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] Negishi M, Deguchi A, Ando M, Takimoto M, Nakamura N. A high-precision coordinate measuring system for super-smooth polishing. Nanotechnology Vol. 139–47 No. 6 (1995).

DOI: 10.1088/0957-4484/6/4/006

Google Scholar

[2] Hosoe S, Yoshida T. Applied measurements of multipurpose precise interferometer (AMOS-1). Nanotechnology Vol. 206–12 No. 4 (1993).

DOI: 10.1088/0957-4484/4/4/005

Google Scholar

[3] Onda H. Development of a unique high precision linear motor integrated air slide table, and its application to laser beam writers. Opt Rev Vol. 88–92 No. 6 (1999).

DOI: 10.1007/s10043-999-0088-2

Google Scholar

[4] Egami T, Nishiyama T. Optimal preview repetitive control for air slide linear motor. Trans Soc Instrum Control Eng (Japan) Vol. 118–20 No. 30 (1994) [in Japanese].

DOI: 10.9746/sicetr1965.30.118

Google Scholar

[5] Watanabe I, Aoyama H, Shimokohbe A. An active air bearing, ultraprecision control of the floating position and vibration. JSPE Vol. 329–34 No. 54 (1988) [in Japanese].

Google Scholar

[6] Fujii Y. Frictional characteristics of an aerostatic linear bearing. Tribology International Vol. 888-896 No. 39 (2006).

DOI: 10.1016/j.triboint.2005.07.040

Google Scholar