Fabrication of Patterned Ferromagnetic Shape Memory Thin Films

P. Álvarez-Alonso; A. Pérez-Checa; I.R. Aseguinolaza; J. Alonso; A.V. Svalov; V.A. Chernenko; J.M. Barandiarán

doi:10.4028/www.scientific.net/KEM.644.219

Paper Titles

Magnetic Nanoparticles of (Co_0.94Fe_0.06)_72.5Si_12.5B₁₅ and Fe₇₈Si₉B₁₃ Obtained by Electric Explosion of Amorphous Wires
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Magnetic Microfluidic Platform for Biomedical Applications Using Magnetic Nanoparticles
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Co/Cu/Co Pseudo Spin-Valve System Prepared by Magnetron Sputtering with Different Argon Pressure
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Simple Set-Up for Adiabatic Measurements of Magnetocaloric Effect
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Fabrication of Patterned Ferromagnetic Shape Memory Thin Films
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Correlation of Cooling Conditions with the Shape of Hysteresis Loops in Air Cooled and Quenched Axis Shaft
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Preparation of Fe(Pt,Pd) Alloy Thin Films with Flat Surfaces on MgO(001) Single-Crystal Substrates
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Magneto-Optical Sensor Based on Fiber Bragg Gratings and a Magnetostrictive Material
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Dynamic Sensitivity and Noise Floor of a Bonded Magneto(Elasto)Electric Laminate for Low Frequency Magnetic Field Sensing under Strain Modulations
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 644Fabrication of Patterned Ferromagnetic Shape...

Fabrication of Patterned Ferromagnetic Shape Memory Thin Films

Abstract:

We report two possible routes of fabrication of large surfaces of ferromagnetic shape memory antidots with tunable pore size and center-to-center distances. By using the drop coating method, we have prepared a large area of 2D arrays (typically 1cm²) of polystyrene spheres (PS) (1.4±0.1μm diameter) on a Si substrate. We have used reactive ion etching with a gas mixture of O₂(12sccm) and Ar (5sccm) to reduce the diameter of the PS spheres whereby controlling the size of pores. The film deposition was performed on a substrate heated at 500oC (route 1) and at room temperature with subsequent annealing in a furnace at 500oC for 4 hours (route 2). Route 1 proved to be promising but more work is needed to optimize it. The antidots of Ni-Mn-Ga obtained along route 2 are ferromagnetic with a Curie temperature ~100oC, and a spread martensitic transformation (between-100oC and-30oC).