Evaluation of Material Parameters of Multiphase Materials Using Drift Distortion Corrected SEM Imaging

Abstract:

In contrast to imaging in visible spectrum temporally-varying distortion (drift distortion) caused by positional errors of electron beam during the scanning process occurs in SEM devices. This effect is always present in the data from SEM and its magnitude depends on acquisition time, magnification and conductivity of the sample (where lower conductivity causes higher drift distortion). In this paper 2D digital image correlation based on Lucas-Kanade algorithm was used to assess drift distortion characteristics of MIRA II LMU SEM device during imaging of materials with different conductivity and microstructural properties. Using the DIC technique deformations in the micrographs were evaluated and tool for correction of positional errors was developed. As shown on a set of selected multiphase mixtures this tool enables qualitative backscattered electron analysis independently on the material type and imaging parameters including acquisition time. This enables reliable evaluation of material parameters that have influence on effective mechanical properties.

• Periodical: Key Engineering Materials (Volume 662)
• Pages: 253-256
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.662.253
• Online since: September 2015
• Authors: Veronika Koudelková*, Petr Koudelka, Daniel Kytýř, Tomáš Doktor, Jaroslav Valach
• Keywords: Digital Image Correlation, Drift Distortion, Microstructure, qBSE, SEM

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