Design and Analysis of a Planar Piezo-Actuated Nanopositioner with Millimeter Scale Stroke

Abstract:

In recent years, Fast Tool Servo (FTS) mechanism in precision manufacturing equipment emerges as a promising application for the piezo-actuated flexible nanopositioner. A flexible nanopositioner with large stroke, high bandwidth, high precision and multi-Degrees-of-Freedom (multi-DOFs) is really desired for this application. In order to meet this requirement, a novel 2-DOF flexible nanopositioner consists of two pairs of differential lever displacement amplifiers (DLDA) is proposed in this paper first, also, kinetostatics modeling is conducted by using the Pseudo-Rigid Body (PRB) method. After a series of mechanism optimal designs, the performance of the designed nanopositioner is verified by using the Finite Element Analysis (FEA) method. A piezoelectric (PZT) actuator with 90 µm is selected in this simulation, the experimental results indicate that the mechanism workspace can achieve around 2.1×2.1 mm², the bandwidth can reach up to around 136 Hz, while the cross-coupling is also kept with 1%. All the results consistently prove the proposed device possesses satisfactory performance for fulfilling the practical precision manufacturing tasks.

• Periodical: Key Engineering Materials (Volume 679)
• Pages: 143-148
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.679.143
• Online since: February 2016
• Authors: Hui Tang*, Jian Gao, Xin Chen, Lan Yu Zhang, Zhao He Zeng
• Keywords: Fast Tool Servo, Flexure, Lever Displacement Amplifier, Nanopositioner, Piezoelectric Actuator, Precision Manufacturing Equipment

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