Paper Titles

A Novel Tool Wear Measurement Method in Ultra-Precision Raster Milling
p.123

The Analysis and Design of a Large Stroke with High-Precision Polarized Laser Interferometer System
p.129

Development and Modeling of a Macro/Micro Composite Positioning System for Microelectronics Manufacturing
p.135

Design and Analysis of a Planar Piezo-Actuated Nanopositioner with Millimeter Scale Stroke
p.143

The Assessment of Subsurface Damage in Ground Optics by Chemical Etching
p.149

A Framework of Data Fusion Algorithm for Precision Measurement of Multiscale Surfaces
p.155

Adaptive Diamond Turning for Micro-Structured Surfaces
p.163

A Study of Fiducial Aided Precision Positioning of Ultra-Precision Freeform Surfaces
p.167

Modeling and Adaptive Control Based on Actor-Critic Algorithm for a Piezo-Positioning System
p.173

HomeKey Engineering MaterialsKey Engineering Materials Vol. 679The Assessment of Subsurface Damage in Ground...

The Assessment of Subsurface Damage in Ground Optics by Chemical Etching

Article Preview

Abstract:

Optical subsurface damage (SSD), generated from traditional grinding and polishing process, is prone to lower the laser-induced damage threshold (LIDT) of optical elements. Due to the fact that SSD elimination is on the premise of SSD evaluation, numerous SSD characterizing techniques have been proposed in the past few decades. In this paper, various SSD evaluations based on chemical etching technique are described and compared.

You might also be interested in these eBooks

Design, Manufacturing and Measurement for Advanced Optics

Info:

Periodical:

Key Engineering Materials (Volume 679)

Pages:

149-153

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.679.149

Citation:

Cite this paper

Online since:

February 2016

Authors:

Hui Ye, Wei Yang*

Keywords:

Chemical Etching, Optical Manufacturing, Subsurface Damage Evaluation

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2016 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

* - Corresponding Author

[1] H. Ye, Y. Li, Z. Yuan, J. Wang, Q. Xu and W. Yang: to be presented in Pacific Rim Laser Damage: Optical Materials for High Power Lasers, Shanghai, China, (2015).

[2] J. Wang, Y. Li, Z. Yuan, H. Ye, R. Xie, X. Chen and Q. Xu: to be presented in Pacific Rim Laser Damage: Optical Materials for High Power Lasers, Shanghai, China, (2015).

[3] H. Liu, J. Huang, F. Wang, X. Zhou, X. Ye, X. Zhou, L. Sun, X. Jiang, Z. Sui and W. Zheng: Opt. Express Vol. 21 (10), (2013), pp.12204-12217.

[4] J. Wang, Y. Li, J. Han, Q. Xu and Y. Guo: J. Euro. Opt. Soc. Rap. Pub., Vol. 6 (2011), pp.11001-16.

[5] Y. Li, N. Zheng, H. Li, J. Hou, X. Lei, X. Chen, Z. Yuan, Z. Guo, J. Wang, Y. Guo and Q. Xu: Appl. Surf. Sci., Vol. 257 (2011) , p.2066–(2073).

[6] Y. Li, H. Huang, R. Xie, H. Li, Y. Deng, X. Chen, J. Wang, Q. Xu, W. Yang and Y. Guo: Opt. Express Vol. 21, (2013), pp.12204-12217.

[7] W. Yang and H. Ye: Adv. Mater. Res., Vol. 675 (2013), pp.227-230.

[8] T. I. Suratwala, P. E. Miller, J. D. Bude, W. A. Steele, N. Shen, M. V. Monticelli, M. D. Feit, T. A. Laurence, M. A. Norton, C. W. Carr, and L. L. Wong: J. Am. Ceram. Soc., Vol. 94 (2011), pp.416-428.

DOI: 10.1111/j.1551-2916.2010.04112.x

[9] L. Wong, T. Suratwala, M. D. Feit, P. E. Miller and R. Steele: J. Non-Cryst. Solids, Vol. 355 (2009), p.797–810.

DOI: 10.1016/j.jnoncrysol.2009.01.037

[10] H. Ye, W. Yang, C. Hu, G. Bi, Y. Peng and Q. Xu: High Power Laser and Particle Beams, Vol. 26 (2014), pp.092010-6(in Chinese).

[11] W. J. Rupp: Appl. Opt. Vol. 13 (1974), pp.1264-1269.

[12] T. Suratwala, L. Wong, P. Miller, M. D. Feit, J. Menapace, R. Steele, P. Davis and D. Walmer: J. Non-Cryst. Solids Vol. 352 (2006), p.5601–5617.

DOI: 10.1016/j.jnoncrysol.2006.09.012

[13] Y. Ahn, N. G. Cho, S. H. Lee and D. Lee: JSME Int. J. Ser. A Vol. 46 (2003), pp.140-144.

[14] D.W. Camp, M. Kozlowskim, L. Sheehan, M. Nichols, M. Dovik, R. Raether, and I. Thomas, Proc. SPIE, Vol. 3244 (1998), pp.356-364.

[15] G. Spierings: J. Mater. Sci. Vol. 28 (1993), p.6261–6273.

[16] S. Verhaverbeke, I. Teerlinck, C. Vinckier, G. Stevens, R. Cartuyyels and M. Heyns: J. Electrochem. Soc., Vol. 141 (1994), pp.2852-2857.

DOI: 10.1149/1.2059243

[17] M. Affatigato, D. H. Osborne and R. F. Haglund: J. Am. Ceram. Soc., Vol. 79 (1996), pp.688-694.

[18] G. Li, Y. Wu, Z. Wang and S. Li: Adv. Prec. Manu. Tech., Vol. 42(2006), pp.19-22(in Chinese).

[19] Z. Wang, Y. Wu, Y. Dai, S. Li, D. Lu and H. Xu: J. Nation Uni. Tech., Vol. 31 (2009), pp.107-111(in Chinese).

[20] Y. Su, Y. Zhou, W. Huang and Z. Gu: J. Chin. Ceram., Vol. 32(2004), pp.287-293(in Chinese).

[21] Z. Wang, Y. Wu, Y. Dai and S. Li: Adv. Prec. Manu. Tech., Vol. 43(2007), pp.1-5(in Chinese).

[22] J. Neauport, C. Ambard, P. Cormont, N. Darbois, J. Destribats, C. Luitot and O. Rondeau: Opt. Express Vol. 17(2009), pp.20448-20456.

DOI: 10.1364/oe.17.020448

[23] P. Cormont, J. Neauport, N. Darbois, J. Destribats, C. Ambard and O. Rondeau: Proc. SPIE Vol. 7504(2009), pp.1-6.

DOI: 10.1364/oe.17.020448

[24] J. Neauport, L. Lamaignere and H. Bercegol: Opt. Express Vol. 13(2005), pp.10163-10171.

[25] F. W. Preston: Opt. Society Vol. 23(1922), pp.141-164.

[26] M. Yang and Y. Zhao: Proc. SPIE Vol. 7504(2009), pp.1-6(in Chinese).

[27] C. Y. Poon and B. Bhushan B: Wear, Vol. 10(1995), pp.76-88.

[28] V. Radhakrishnan: Wear, Vol. 10(1970), pp.325-335.

[29] P. P. Hed and D. F. Edwards: Appl. Opt. Vol26(1987), p.4677.

[30] C. Hu, G. Bi, H. Ye and H. Li: J. Synth. Cryst. Vol. 43(2014), pp.2929-2934(in Chinese).