[1]
K. Garrard, T. Bruegge, J. Hoffman, T. Dow, A. Sohn. Design tools for freeform optics. Proceedings of the SPIE, 5874(2005): 95-105.
DOI: 10.1117/12.617680
Google Scholar
[2]
Shieh HJ, Lin FJ, Huang PK, Teng LT. Adaptive tracking control solely using displacement feedback for a piezo-positioning mechanism. IEE P Contr Theor Ap, 2004, 151(5): 653–660.
DOI: 10.1049/ip-cta:20040795
Google Scholar
[3]
Zhao L, Chen D, Kong H. Neuron net control and its application in precision feed mechanism of machine tool driven by PZT. Proceedings of the IEEE International Conference on Industrial Technology, Shanghai, China, (1994).
DOI: 10.1109/icit.1996.601545
Google Scholar
[4]
Tong Z, Tan Y, Zeng X. Modeling hysteresis using hybrid method of continuous transformation and neural networks. Sens Actuat A Phys, 2005, 19(1): 254–262.
DOI: 10.1016/j.sna.2004.09.019
Google Scholar
[5]
Y.E. Tohme, J.A. Lowe. Machining of freeform optical surfaces by slow slide servo method. Proceedings of the American Society for Precision Engineering, (2003).
Google Scholar
[6]
T.A. Dow, M.H. Miller, P.J. Falter, Application of a fast tool servo for diamond turning of non-rotationally symmetric surfaces. Precision Engineering, 1991, 13(4): 243–250.
DOI: 10.1016/0141-6359(91)90001-y
Google Scholar
[7]
Gan S W, Lim H S, Rahman M, et al. A Fine Tool Servo System for Global Position Error Compensation for a Miniature Ultra precision Lathe. International Journal of Machine Tools & Manufacture, 2007, 47: 130221310.
DOI: 10.1016/j.ijmachtools.2006.08.023
Google Scholar
[8]
Marten F B. Design and Control of a Long Stroke Fast Tool Servo. Boston. Massachusetts: Massachusetts Institute of Technology, (2005).
Google Scholar
[9]
Information on http: /www. precitech. com.
Google Scholar
[10]
Information on http: /www. satisloh. com.
Google Scholar
[11]
Stephen J. Ludwick. A rotary fast tool servo for diamond turning of asymmetric optics. Ph.D. Thesis, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, (1999).
Google Scholar
[12]
Marten F. Byl. Design and control of a long stroke fast tool, Ph.D. Thesis, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, (2005).
Google Scholar
[13]
Joseph H. Cattell. Adaptive feedforward cancellation from an oscillator amplitude control perspective. Master's thesis, Massachusetts Institute of Technology, Department of Mechanical Engineering, (2003).
Google Scholar
[14]
Xiaodong Lu. Electromagnetically-driven ultra-fast tool servos for diamond turning. Ph.D. Thesis, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, (2005).
Google Scholar
[15]
Ya. Z. Tsypkin, U. Holmberg. Robust stochastic control using the internal model principle and internal model control. Int. J. Control, 1995, 61(4): 809-822.
DOI: 10.1080/00207179508921932
Google Scholar
[16]
Zai Wenjiao, Wang Huazhang, Zhou Jing, Shen Minghui. Internal Model-PID Cascade Control. JOURNAL OF ZHONGYUAN INSTITUTE OF TECHNOLOGY. 2005, 16(2): 46-49.
Google Scholar