Investigation of the Microstructure and Mechanical Properties of Si-Al-N Transparent Coatings

Abstract:

Nanocomposite coatings on the basis of Si-Al-N with different ratios of Al and Si concentrations were prepared using the reactive magnetron sputtering method. Internal stresses and structural-phase state of the two types of coatings was examined by X-ray analysis. The microhardness was measured by nanoindentation method. The microhardness, the elastic modulus and the coefficient of elastic recovery were determined. The optical transmission was measured for all types of samples.

• Periodical: Key Engineering Materials (Volume 683)
• Pages: 262-268
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.683.262
• Online since: February 2016
• Authors: Irina A. Bozhko, Evgeniya V. Rybalko, Marina V. Fedorishcheva, Yury A. Vorobiev, Rais M. Magzhanov, Alexander G. Chernyavsky, Viktor Sergeev
• Keywords: Magnetron Deposition, Mechanical Properties, Nanocomposite Coating, Optical Property, Phase Composition, Structure, Transparent Coatings

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