Study on the Influence of Roughness on the Detection for Mechanical Characteristics of the Machined Surface by Surface Acoustic Wave Dispersion Theory

Abstract:

The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the precision-machined surface. The paper is concerned with the effect of the roughness of the machined surface on the dispersion of surface acoustic waves propagating in the precision-machined surface which indicates mechanical characteristics of the machined surface. The finite element method (FEM) is employed by establishing a series of models with different roughness Ra value to analyze influences from different roughness Ra value on surface acoustic wave dispersion. The models are established by applying a combined method based on fractal theory and wavelet analysis. The simulation results showed that the roughness of machined surface will cause the dispersion of surface acoustic wave propagation, the effect varies with the different roughness Ra values. A critical Ra value influencing on the surface acoustic wave propagation exists. Accordingly, that the factor of roughness should be considered in advance or not, the situation can be determined through studying and determining the critical roughness Ra value above mentioned. Consequently, the study has the important meaning regarding the detection for mechanical characteristics of the machined surface.

• Periodical: Key Engineering Materials (Volume 693)
• Pages: 1447-1452
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.693.1447
• Online since: May 2016
• Authors: Jing Lei Xu*, Bin Lin, Ya Xu Wei
• Keywords: Dispersion, Machined Surface, Mechanical Character, Roughness, Surface Acoustic Wave

References

[1] R.M. White, Elastic Wave Generation by Electron Bombardment or Electromagnetic Wave Absorption[J].J. Appl. Phys, 1963, 34: 2123-2124.

DOI: 10.1063/1.1729762

[2] Urazakov.E. I, Fal'kovsk. L. A, Propagation of a Rayleigh-wave along a rough surface [J], Zh Eksp Teor Fiz, 1972, 63: 2297.

[3] R.F. Wallis, D.L. mills and A.A. Maradudin, Attenuation of Rayleigh waves by point defects [J], Phys. Rev. B, 1979, 19: 3981-3995.

DOI: 10.1103/physrevb.19.3981

[4] A.G. Eguiluz and A.A. Maradudin, Frequency shift and attention length of a Rayleigh wave on a rough surface [J], Phys. Rev. B, 1983, 28: 728-747.

DOI: 10.1103/physrevb.28.728

[5] X. Huang and A.A. Maradudin, Phys. Rev. B, 1987, 36: 7827.

[6] V.V. Krylov and Z.A. Smimova, Sov. phys. Acoust, 1990, 36: 583.

[7] D. Schneider, S. Fruhauf, S. E Schulz, T. Gessner. The current limits of the laser-acoustic test method to characterize low-films, Microelectronic Engineering 82(2005) 393-398.

DOI: 10.1016/j.mee.2005.07.073

[8] D. Schneider,S. Fruhauf, S. E Schulz, T. Gessner. The current limits of the laser-acousic test method to characterize low-films, Microelectronic Engineering 82(2005) 393-398.

DOI: 10.1016/j.mee.2005.07.073

[9] Yanbin ZHANG , Research on Damage Characterization and Function Evaluation of Advanced Ceramics Ground Surface, 2013, 12: 22-31.

[10] Yannis Orphanos, Vasilis Dimitriou, Evaggelos Kaselouris. An integrated method for material properties characterization based on pulsed laser generated surface acoustic waves. Microelectronic Engineering 112(2013) 249-254.

DOI: 10.1016/j.mee.2013.03.146