Effect of Humidity and Bias on the Size of Nanostructures Fabricated by STM Anodization and its Application to Patterns

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doi:10.4028/www.scientific.net/KEM.698.35

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Effect of Humidity and Bias on the Size of Nanostructures Fabricated by STM Anodization and its Application to Patterns
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Effect of Humidity and Bias on the Size of Nanostructures Fabricated by STM Anodization and its Application to Patterns

Abstract:

In this paper, the effect of humidity and sample bias on the size of nanostructures fabricated by STM anodization on a 3 nm-thick Ti film was investigated by random nano-arrays. 3.5 V and 4 V bias were applied to samples at a relative humidity of ~30% while 3.5 V, 4 V and 4.5 V were applied to samples at a relative humidity of ~43%. According to the cross section analyses, dots scattered randomly on surfaces became larger and higher as the bias increased at a constant relative humidity or as the relative humidity increased at the same bias. Two complicated patterns were fabricated by running a program in which the movement of STM tip and the sample bias were defined.