Effects of Deposition Time on the Structure and Properties of AZO Thin Films Deposited on Quartz Glass by Magnetron Sputtering

Jing Kang Ba; Yun Zhang; Xiao Jing Wang

doi:10.4028/www.scientific.net/KEM.807.63

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 807Effects of Deposition Time on the Structure and...

Effects of Deposition Time on the Structure and Properties of AZO Thin Films Deposited on Quartz Glass by Magnetron Sputtering

Abstract:

The AZO films deposited on quartz glass by magnetron sputtering with different deposition time various from 30min to 120min.All of the obtained samples had a (002) diffraction peak range from 34.31 to 34.52°, while the mean grain size increased from 30.1nm (30min) to 56.1nm (120min) respectively. The XPS survey indicated the photoelectron peaks of Zn ,O and C elements occured. The optimal transmittance of the films reduced obviously from about 92% to 78% near 550nm with deposition time increased from 30min to 120min. And the average transmittance of AZO films prepared at 30, 60 and 90min was about 85% in the visible light region.

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Periodical:

Key Engineering Materials (Volume 807)

Pages:

63-67

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.807.63

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Online since:

June 2019

Authors:

Jing Kang Ba, Yun Zhang, Xiao Jing Wang*

Keywords:

AZO Films, Deposition Time, Magnetron Sputtering, Properties, XPS Analysis

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