PVD Coatings in the System Si-Al-O-N

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

275-282

Citation:

O. Knotek et al., "PVD Coatings in the System Si-Al-O-N", Key Engineering Materials, Vols. 89-91, pp. 275-282, 1994

Online since:

August 1993

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$38.00

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