Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies

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Periodical:

Key Engineering Materials (Volumes 89-91)

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Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

301-306

Citation:

J. Chen et al., "Oxidation of Pure Si3N4: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies ", Key Engineering Materials, Vols. 89-91, pp. 301-306, 1994

Online since:

August 1993

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