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HomeKey Engineering MaterialsKey Engineering Materials Vols. 89-91Oxidation of Pure Si3N4: Spectroscopic...

Oxidation of Pure Si₃N₄: Spectroscopic Ellipsometry and Glancing Angle X-Ray Diffraction Studies

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Silicon Nitride '93

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Periodical:

Key Engineering Materials (Volumes 89-91)

Pages:

301-306

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.89-91.301

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Online since:

August 1993

Authors:

J. Chen, H. Arwin, Maiken Heim, J. Sjöberg

Keywords:

Devitrification, Glancing Angle X-Ray Diffraction (GAXRD), Oxidation, Spectroscopic Ellipsometry (SE)

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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