Surface Modification of Dense Silicon Nitride by Ion Beam Techniques

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Periodical:

Key Engineering Materials (Volumes 89-91)

Main Theme:

Edited by:

Michael J. Hoffmann, Paul F. Becher and Günther Petzow

Pages:

319-326

DOI:

10.4028/www.scientific.net/KEM.89-91.319

Citation:

C. Taut et al., "Surface Modification of Dense Silicon Nitride by Ion Beam Techniques", Key Engineering Materials, Vols. 89-91, pp. 319-326, 1994

Online since:

August 1993

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$35.00

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