Reclamation of Abrasive Slurry to Obtain SiC Ceramic Material

Abstract:

In the period of silicon and silicon carbide wafer slicing process, the abrasive oil, silicon carbide (SiC), silicon and trace elements e.g., iron, zinc, copper, and nickel is generated as an oily mixture of insoluble matter. The SiC is the main component (>70%) in the abrasive slurry and the extraction of SiC from the slurry can eliminate the risk of illegal waste disposal and reduce the cost for the enterprises. In this study, a chemical separation process is applied to remove silicon particles and SiC can be extracted from the slurry mixtures. The X-ray diffraction analysis revealed that recycled material is moissanite with two crystalline polymorphs. The 3C and 6H X-ray powder pattern is observed and the cubic and hexagonal crystalline structure is revealed. The particle size distribution analysis showed that median value of purified SiC powder material is 9.8 μm.

• Periodical: Key Engineering Materials (Volume 905)
• Pages: 333-337
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.905.333
• Online since: January 2022
• Authors: Sheng Fu Yang*, Chun Liang Chen, Kuang Li Chien, Chih Chao Liang, Hsien Ho Chuo
• Keywords: Abrasive Slurry, Moissanite, Silicon Carbide

References

[1] N. Boutouchent-Guerfi, M.A. Boussourdi, A. Lami, M. Ould-Hamou, N. Drouiche, Dry Magnetic Separation on the Recovery of Metal Fragments from Kerf Slurry Waste Produced during the Manufacture of Photovoltaic Solar Cells, Silicon 13, 149-153, (2021).

DOI: 10.1007/s12633-020-00412-6

[2] H.C. Li, W.S. Chen, Recovery of silicon carbide from waste silicon slurry by usingflotation, Energy Procedia 136, 53-59, (2017).

DOI: 10.1016/j.egypro.2017.10.281

[3] S.J. Lee, T.H. Kim, D.W. Kim, D.W. Park, Preparation of silicon nanopowder by recycling silicon wafer waste in radio-frequency thermal plasma process, Plasma Chem. Plasma process. 37, 967-978,(2017).

DOI: 10.1007/s11090-017-9814-x

[4] T.Y. Wang, Y.C. Lin, C.Y. Tai, C.C. Fei, M.Y. Tseng, C.W. Lan, Recovery of silicon from kerf loss slurry waste for photovoltaic applications, Prog. Photovoltaics Res. Appl. 17, 155-163, (2009).

DOI: 10.1002/pip.863

[5] Y.F. Wu, Y.M. Chen, Separation of silicon and silicon carbide using an electrical field, Sep. Purif. Technol. 68, 70-74, (2009).

[6] Y.C. Lin, T.Y. Wang, C.W. Lan, C.Y. Tai,Recovery of silicon powder from kerf loss slurry by centrifugation, Powder Technol. 200, 216-223, (2010).

DOI: 10.1016/j.powtec.2010.02.028

[7] T.H. Tsai, Modified sedimentation system for improving separation of silicon and silicon carbide in recycling of sawing waste, Sep. Purif. Technol. 78, 16-20, (2011).

DOI: 10.1016/j.seppur.2011.01.011

[8] A. Yoko, Y. Oshima, Recovery of silicon from silicon sludge using supercritical water, Sep. Purif. Technol. 78, 16-20, (2011).

[9] H.Y. Wang, Y. Tan, J.Y. Li, W. Dong, Removal of silicon carbide from kerf loss slurry by Al–Si alloying process, Sep. Purif. Technol. 89, 91-93, (2012).

DOI: 10.1016/j.seppur.2012.01.021

[10] S. Nishijima, Y. Izumi, S.I. Takeda, H. Suemoto, A. Nakahira, S.I. Horie, Recycling of abrasives from wasted slurry by superconducting magnetic separation, IEEE Trans.Appl. Supercond. 13, 1596-1599, (2003).

DOI: 10.1109/tasc.2003.812800