Design of Electrical Sheet Resistance of Thin Film Measurement System Based on GM Cryocooler in Cryogenic Temperature

Abstract:

The determination of the dependencies of the electrical resistivity of the thin film to temperature is of great importance both for understanding the conduction mechanism and for numerous technical applications of these films. In this work, to characterize, the electrical properties of thin films, a GM cryocooler-based automatic board temperature range electrical properties measurement system has been constructed. The system can measure multiple samples simultaneously. The cooling process was simulated using the time-discrete differencing to validate the optimized device design parameters and minimize heat losses. Furthermore, the temperature-dependent sheet resistance results were compared with the results from the physical property measurement system.

• Periodical: Key Engineering Materials (Volume 977)
• Pages: 63-68
• DOI: https://doi.org/10.4028/p-aI4edT
• Online since: March 2024
• Authors: Zhen Geng, Ye Mao Han*, Zheng Rong Zhou, Hao Ying Qi, Yu Chen Zhao, Hao Jian Su, Rong Jin Huang, Lai Feng Li
• Keywords: Low Temperature, Sheet Resistance, Thin Film, Van De Pauw Method

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