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HomeMaterials Science ForumMaterials Science Forum Vols. 105-110A Study of Structural Defects in Sputtered ZrN...

A Study of Structural Defects in Sputtered ZrN Films

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Positron Annihilation - ICPA-9

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Periodical:

Materials Science Forum (Volumes 105-110)

Pages:

913-916

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.105-110.913

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Online since:

January 1992

Authors:

J. Brunner, Anthony J. Perry, J.P. Schaffer, W.D. Sproul

Keywords:

Structural Defects, Vapor Deposition, ZrN Films

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© 1992 Trans Tech Publications Ltd. All Rights Reserved

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