Low-Temperature Atmospheric Pressure Plasma Jets and their Applications in the Surface Activation of some Polymeric Substrates for Advanced Electronic Packaging

Abstract:

The present study applied low-temperature atmospheric plasma (LTAPP) jets to modify polymer substrates used in chip packaging. These substrates include bismaleimide triazine (BT), polyimide (PI) and PTFE materials. All these materials play important roles in modern semiconductor packaging. During the study, focuses were aimed the effects of reactive species (mainly OH and atomic oxygen) generated by atmospheric plasma jets on surface energy, water contact angle (WCA) and surface composition of these three substrates. In order to better understand and apply LTAPP jets, another focus will be on the understanding of the relationship among (1) the generation and distribution of various reactive species, (2) parameters for generating LTAPP jet, and (3) plasma characteristics. The plasma activation mechanism of these substrates was also discussed. In addition to plasma generation using AC high-voltage supplies, plasma characterization using optical emission spectroscopy (i.e., analysis of electron density, electron temperature, plasma temperature, and reactive species), XPS and water WCA analysis were used to understand surface activation mechanisms. In sum, Ar and Ar-O₂ plasma jets can be used to modify the surfaces of these three substrates, although the latter relies on the generation of O radicals, while the former relies on OH radicals more. According to the results obtained by XPS analysis, the formation of C-O and C=O bond after plasma treatment is the main reason for surface activation in this study.

• Periodical: Materials Science Forum (Volume 1112)
• Pages: 121-129
• DOI: https://doi.org/10.4028/p-I2rxo0
• Online since: February 2024
• Authors: Shan Yao Hsu, Chuan Ming Tseng, Jang Hsing Hsieh*
• Keywords: Electronic Packing, Low Temperature Atmospheric Pressure Plasma, Plasma Characteristics, Polymer Substrate, Surface Activation

References

[1] B. I. Noh and S. B. Jung, "Characterisation of FR-4 substrate with various plasma treatment conditions," Materials Science and Technology, vol. 23, no. 7, pp.792-798, (2013)

DOI: 10.1179/174328407x168874

[2] Y. Guo et al., "High performance fluorinated Bismaleimide-Triazine resin with excellent dielectric properties," Journal of Polymer Research, vol. 25, no. 2, p.27, (2017)

DOI: 10.1007/s10965-017-1407-0

[3] Y.-S. Lin, H.-M. Liu, and H.-T. Chen, "Surface modification of polyimide films by argon plasma for copper metallization on microelectronic flex substrates," Journal of Applied Polymer Science, https://doi.org/10.1002/app.22545 vol. 99, no. 3, pp.744-755, (2006)

DOI: 10.1002/app.22545

[4] T. Takamatsu, H. Hirai, R. Sasaki, H. Miyahara, and A. Okino, "Surface Hydrophilization of Polyimide Films Using Atmospheric Damage-Free Multigas Plasma Jet Source," IEEE Transactions on Plasma Science, vol. 41, no. 1, pp.119-125, (2013)

DOI: 10.1109/tps.2012.2227459

[5] X. Lu, G. V. Naidis, M. Laroussi, S. Reuter, D. B. Graves, and K. Ostrikov, "Reactive species in non-equilibrium atmospheric-pressure plasmas: Generation, transport, and biological effects," Physics Reports, vol. 630, pp.1-84, (2016)

DOI: 10.1016/j.physrep.2016.03.003

[6] L. Bárdos and H. Baránková, "Cold atmospheric plasma: Sources, processes, and applications," Thin Solid Films, vol. 518, no. 23, pp.6705-6713, (2010)

DOI: 10.1016/j.tsf.2010.07.044

[7] K. G. Kostov, T. M. C. Nishime, A. H. R. Castro, A. Toth, and L. R. O. Hein, "Surface modification of polymeric materials by cold atmospheric plasma jet," Applied Surface Science, vol. 314, pp.367-375, (2014)

DOI: 10.1016/j.apsusc.2014.07.009

[8] X. Lu, M. Laroussi, and V. Puech, "On atmospheric-pressure non-equilibrium plasma jets and plasma bullets," Plasma Sources Science and Technology, vol. 21, no. 3, p.034005, (2012)

DOI: 10.1088/0963-0252/21/3/034005

[9] V. Bagiatis, G. W. Critchlow, D. Price, and S. Wang, "The effect of atmospheric pressure plasma treatment (APPT) on the adhesive bonding of poly (methyl methacrylate) (PMMA)-to-glass using a polydimethylsiloxane (PDMS)-based adhesive," International Journal of Adhesion and Adhesives, vol. 95, p.102405, (2019)

DOI: 10.1016/j.ijadhadh.2019.102405

[10] A. Schutze, J.Y. Jeong, S.E. Babayan, J. Park, G.S. Selwyn, and R.F. Hicks, "The atmospheric-pressure plasma jet: a review and comparison to other plasma sources," IEEE transactions on plasma science, vol. 26, no. 6, pp.1685-1694, (1998)

DOI: 10.1109/27.747887

[11] P. Cullen and V. Milosavljević, "Spectroscopic characterization of a radio-frequency argon plasma jet discharge in ambient air," Progress of Theoretical and Experimental Physics, vol. 2015, no. 6, (2015)

DOI: 10.1093/ptep/ptv070

[12] J. L. Walsh, F. Iza, N. B. Janson, V. Law, and M. G. Kong, "Three distinct modes in a cold atmospheric pressure plasma jet," Journal of Physics D: Applied Physics, vol. 43, no. 7, p.075201, (2010)

DOI: 10.1088/0022-3727/43/7/075201