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HomeMaterials Science ForumMaterials Science Forum Vols. 113-115The Effect of Grain-Specific Texture on Hillock...

The Effect of Grain-Specific Texture on Hillock Growth in Al-1%Si Films on SiO₂/Si Substrates

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Recrystallization '92

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Periodical:

Materials Science Forum (Volumes 113-115)

Pages:

625-630

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.113-115.625

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Online since:

January 1993

Authors:

D. Gerth, Robert A. Schwarzer

Keywords:

Al Films, Conductor Layers, Grain Boundary, Hillock Growth, Local Texture, TEM, Thin Film

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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