Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 133-136)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

873-878

DOI:

10.4028/www.scientific.net/MSF.133-136.873

Citation:

P. Gergaud and J.J. Bacmann, "Internal Stress Tensor Determination in Molybdenum and Molybdenum-Carbon Thin Films Deposited by D.C. Magnetron Sputtering", Materials Science Forum, Vols. 133-136, pp. 873-878, 1993

Online since:

January 1993

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$35.00

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