X-Ray Diffraction Characterisation of Polysilicon Layers

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Periodical:

Materials Science Forum (Volumes 133-136)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

891-896

Citation:

J.G.E. Klappe et al., "X-Ray Diffraction Characterisation of Polysilicon Layers", Materials Science Forum, Vols. 133-136, pp. 891-896, 1993

Online since:

January 1993

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$38.00

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