XRD-Investigations of Phase-Formation in High Dose Fe- and Co-Ion Co-implanted Si (100) Wafers

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Periodical:

Materials Science Forum (Volumes 133-136)

Edited by:

R. Delhez and E.J. Mittemeijer

Pages:

903-906

DOI:

10.4028/www.scientific.net/MSF.133-136.903

Citation:

G. Querner et al., "XRD-Investigations of Phase-Formation in High Dose Fe- and Co-Ion Co-implanted Si (100) Wafers", Materials Science Forum, Vols. 133-136, pp. 903-906, 1993

Online since:

January 1993

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