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HomeMaterials Science ForumMaterials Science Forum Vols. 140-142Alkane Plasma Etching of Gallium Arsenide

Alkane Plasma Etching of Gallium Arsenide

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Plasma Properties, Deposition and Etching

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Periodical:

Materials Science Forum (Volumes 140-142)

Pages:

659-688

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.140-142.659

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Online since:

October 1993

Authors:

V.J. Law, M. Tewordt, S.G. Ingram, G.A.C. Jones

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© 1993 Trans Tech Publications Ltd. All Rights Reserved

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