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HomeMaterials Science ForumMaterials Science Forum Vols. 143-147Structural Study of Hydrogen Induced Platelet in...

Structural Study of Hydrogen Induced Platelet in Si and Ge by Transmission Electron Microscopy

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Defects in Semiconductors 17

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Periodical:

Materials Science Forum (Volumes 143-147)

Pages:

897-902

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.143-147.897

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Online since:

October 1993

Authors:

S. Muto, S. Takeda, Masako Hirata

Keywords:

Diffraction Contrast, Ge, High Resolution Transmission Electron Microscopy, Hydrogen Induced Platelet, Silicon

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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