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HomeMaterials Science ForumMaterials Science Forum Vols. 173-174Fabrication and Characterisation of N+ Doped Laser...

Fabrication and Characterisation of N⁺ Doped Laser Crystallised Polysilicon

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Semiconductor Processing and Characterization with Lasers

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Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

67-72

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.67

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Online since:

September 1994

Authors:

E. Al-Nuaimy, J.M. Marshall, T.E. Dyer, A.R. Hepburn, J.F. Davies

Keywords:

Electronic Properties, Laser Crystallisation, Laser Doping, Spin-on-Dopant, Structural Property

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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