For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Femtosecond-Pulse Laser Microstructuring of Semiconducting Materials
p.17
Modification of Foreign Atom Concentrations and Profiles in Silicon and Si1-x-y GexCy Alloys by Laser Chemical Etching
p.23
Properties of Recrystallized Amorphous Silicon Prepared by XeCl Excimer Laser Irradiation
p.29
Kinetics of Laser-Induced Synthesis and Crystallization of Thin Semiconductors Films
p.35
Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation
p.41
Laser Patterning of CuInSe2/Mo/SLS Structures for the Fabrication of CuInSe2 Sub Modules
p.53
UV-Excimer Laser Ablation Patterning of II-VI Compound Semiconductors
p.59
Fabrication and Characterisation of N+ Doped Laser Crystallised Polysilicon
p.67
Pulsed Laser Ablation: A Method for Deposition and Processing of Semiconductors at an Atomic Level
p.73

Surface Patterning and Thin-Film Formation by Pulsed-Laser Ablation

Article Preview

Abstract:

You might also be interested in these eBooks
Semiconductor Processing and Characterization with Lasers View Preview

Info:

Periodical:

Materials Science Forum (Volumes 173-174)

Pages:

41-52

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.173-174.41

Citation:

Cite this paper

Online since:

September 1994

Authors:

D. Bäuerle, Enno Arenholz, J. Heitz, S. Proyer, E. Stangl, B. Luk'yanchuk

Keywords:

Pulsed-Laser Ablation, Surface Patterning, Thin Film Formation

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 1995 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

This article has no references.

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.