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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201Screening Effect of Binding of P-Si-H Complex in...

Screening Effect of Binding of P-Si-H Complex in Silicon

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Defects in Semiconductors 18

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Periodical:

Materials Science Forum (Volumes 196-201)

Pages:

873-878

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201.873

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Online since:

November 1995

Authors:

N. Fukata, S. Fujimura, Kenji Murakami

Keywords:

ESR of Donors, H Atom Treatment, P-Si-H Complex, Screening Effect

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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