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HomeMaterials Science ForumMaterials Science Forum Vols. 210-213An X-Ray Sensitive CCD Camera System and Its...

An X-Ray Sensitive CCD Camera System and Its Application to the X-Ray Diffractometric Investigation on Area Selective Semiconductor Epitaxy

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Nondestructive Characterization of Materials VII

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Periodical:

Materials Science Forum (Volumes 210-213)

Pages:

219-226

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.210-213.219

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Online since:

May 1996

Authors:

F. Fandrich, R. Köhler

Keywords:

Area Selective Epitaxy, Intensified CCD Camera, X-Ray Diffractometry, X-Ray Investigations, X-Ray Sensitive Camera, X-Ray Topography

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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