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HomeMaterials Science ForumMaterials Science Forum Vols. 228-231Study of the Growth of Thin Expitaxial CVD Diamond...

Study of the Growth of Thin Expitaxial CVD Diamond Films on Silicon

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Periodical:

Materials Science Forum (Volumes 228-231)

Pages:

445-450

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.228-231.445

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Online since:

July 1996

Authors:

S. Geier, R. Hessmer, M. Schreck, B. Stritzker, B. Rauschenbach, Kurt Helming, Karsten Kunze, W. Erfurth

Keywords:

CVD Diamond, Epitaxy, Growth, Texture, Thin Film

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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