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HomeMaterials Science ForumMaterials Science Forum Vols. 258-263Vacancies and Interstitial Atoms in eֿ-Irradiated...

Vacancies and Interstitial Atoms in eֿ-Irradiated Silicon

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Defects in Semiconductors 19

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Periodical:

Materials Science Forum (Volumes 258-263)

Pages:

503-508

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.258-263.503

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Online since:

December 1997

Authors:

Holger Zillgen, Peter Ehrhart

Keywords:

Electron Irradiation, Frenkel Pairs, Interstitial Atoms, Silicon, Vacancy

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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