Modeling of Growth Processes in Epitaxial Reactors

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Periodical:

Materials Science Forum (Volumes 276-277)

Edited by:

R. Fornari and C. Paorici

Pages:

135-152

Citation:

S. Carrà et al., "Modeling of Growth Processes in Epitaxial Reactors", Materials Science Forum, Vols. 276-277, pp. 135-152, 1998

Online since:

March 1998

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