Investigations of TiN Films Optical and Mechanical Characteristics

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Periodical:

Materials Science Forum (Volumes 282-283)

Edited by:

Dragan P. Uskokovic, Slobodan K. Milonjic, Dejan I. Rakovic

Pages:

139-146

DOI:

10.4028/www.scientific.net/MSF.282-283.139

Citation:

M. Zlatanović et al., "Investigations of TiN Films Optical and Mechanical Characteristics", Materials Science Forum, Vols. 282-283, pp. 139-146, 1998

Online since:

May 1998

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$35.00

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