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HomeMaterials Science ForumMaterials Science Forum Vols. 282-283Investigations of TiN Films Optical and Mechanical...

Investigations of TiN Films Optical and Mechanical Characteristics

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Advanced Materials and Processes: YUCOMAT '97

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Periodical:

Materials Science Forum (Volumes 282-283)

Pages:

139-146

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.282-283.139

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Online since:

May 1998

Authors:

M. Zlatanović, D. Šešum, Dj. Djukić, N. Popović

Keywords:

Magnetron Sputtering, Mechanical Characteristic, Optical Characteristics, Titanium Nitride TiN

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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