New Class of Thin Amorphous Films Produced by PE CVD from Orangic Compounds of Carbon Family

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

431-436

DOI:

10.4028/www.scientific.net/MSF.287-288.431

Citation:

J. Tyczkowski and B. Pietrzyk, "New Class of Thin Amorphous Films Produced by PE CVD from Orangic Compounds of Carbon Family", Materials Science Forum, Vols. 287-288, pp. 431-436, 1998

Online since:

August 1998

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$35.00

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