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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288New Class of Thin Amorphous Films Produced by PE...

New Class of Thin Amorphous Films Produced by PE CVD from Orangic Compounds of Carbon Family

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

431-436

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.431

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Online since:

August 1998

Authors:

J. Tyczkowski, B. Pietrzyk

Keywords:

Amorphous Hydrogenated Carbon Alloys, Amorphous Insulator, Amorphous Semiconductor, Electrical Properties, Electronic Structure, Optical Property, Plasma Chemical Vapor Deposition

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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