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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288

Materials Science Forum Vols. 287-288

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288

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Table of Contents

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Paper Title Page

Preface

Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass Spectrometry

Authors: P. Awakowicz

3

Crystallography and Microstructure of Thin Films Studied by X-Ray and Electron Diffraction

Authors: Robert A. Schwarzer

23

Surface and Thin Film Analysis with Electron and Mass Spectrometric Techniques

Authors: A. Wucher

61

The Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal Displays

Authors: E. Lueder

87

Doping Diamonds and Diamond Films for Electronic Applications

Authors: R. Kalish

97

Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films

Authors: A. Billard, C. Frantz

107

Fabrication of Micro- and Nanostructures

Authors: R. Kassing

119

Modelling of PVC Processes

Authors: J. Machet, C. Gautier-Picard, P. Cledat, O. Piot

131

Real Time Optical Method of Stress Measurements in Thin Films

Authors: G. Moulard, G. Contoux, G. Motyl, M. Courbon

141

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