Real Time Optical Method of Stress Measurements in Thin Films

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

141-150

Citation:

G. Moulard et al., "Real Time Optical Method of Stress Measurements in Thin Films", Materials Science Forum, Vols. 287-288, pp. 141-150, 1998

Online since:

August 1998

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