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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Real Time Optical Method of Stress Measurements in...

Real Time Optical Method of Stress Measurements in Thin Films

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Abstract:

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Trends and New Applications of Thin Films

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

141-150

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.141

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Cite this paper

Online since:

August 1998

Authors:

G. Moulard, G. Contoux, G. Motyl, M. Courbon

Keywords:

Cantilever, Image Processing, Intrinsic Stress, Stress

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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