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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288In-Situ Control of Stoichiometry in Room...

In-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO₂ Thin Films Using a Novel Hyperthermal Oxygen Atom Source

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

181-184

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.181

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Online since:

August 1998

Authors:

E. Wisotzki, Horst Hahn, G.B. Hoflund

Keywords:

Atomic Oxygen, Electron Stimulated Desorption, Oxide Thin Films, Zro₂

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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