Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

193-200

DOI:

10.4028/www.scientific.net/MSF.287-288.193

Citation:

F. Richter et al., "Cathodic Arc Evaporation - A Versatile Tool for Thin Film Deposition", Materials Science Forum, Vols. 287-288, pp. 193-200, 1998

Online since:

August 1998

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Price:

$35.00

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