Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

211-214

Citation:

R. Krawietz et al., "Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon", Materials Science Forum, Vols. 287-288, pp. 211-214, 1998

Online since:

August 1998

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