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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Piezo-Spectroscopic Stress Measurement near...

Piezo-Spectroscopic Stress Measurement near PZT-Microstructures on Silicon

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

211-214

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.211

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Online since:

August 1998

Authors:

R. Krawietz, W. Pompe, A. Gerbatsch, V. Sergo, L.C. Ciacchi

Keywords:

Ferroelectric, PZT, Raman Spectroscopy, Silicon, Stress Measurement

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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