Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

231-234

DOI:

10.4028/www.scientific.net/MSF.287-288.231

Citation:

R. Getto et al., "Depth Profiling of Thin TiSix-Films on Silicon Carbide by SNMS", Materials Science Forum, Vols. 287-288, pp. 231-234, 1998

Online since:

August 1998

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Price:

$35.00

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