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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Depth Profiling of Thin TiSix-Films on Silicon...

Depth Profiling of Thin TiSi_x-Films on Silicon Carbide by SNMS

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

231-234

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.231

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Online since:

August 1998

Authors:

R. Getto, J. Freytag, M. Kopnarski, H. Oechsner

Keywords:

Metallization, Ohmic Contact, Silicon Carbide (SiC), SNMS

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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