Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

247-250

DOI:

10.4028/www.scientific.net/MSF.287-288.247

Citation:

M. Ruske et al., "Properties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 247-250, 1998

Online since:

August 1998

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$35.00

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