中文

Paper Titles

Copper Metallization of Submicron Trenches with Pulsed Vacuum Arc
p.239

High Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon Films
p.243

Properties of Si₃N₄-Layers Deposited by Medium Frequency Twin Magnetron Sputtering
p.247

On the Initial Cubic Phase Nucleation in Boron Nitride Films
p.251

Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation
p.255

Gradient Interface Layers to Improve c-BN Thin Film Adhesion
p.259

Microhardness, Microstructure and Composition Behavior of Stainless Steel 304 Laser Surface Alloyed with Silicon
p.263

Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering
p.267

Infrared Analysis of Boron Nitride Thin Films
p.269

HomeMaterials Science ForumTrends and New Applications of Thin FilmsStructure, Composition and Residual Stresses of...

Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 287-288)

Main Theme:

Trends and New Applications of Thin Films

Edited by:

Horst Hoffmann

Pages:

255-258

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.255

Citation:

L. Dumas et al., "Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation", Materials Science Forum, Vols. 287-288, pp. 255-258, 1998

Online since:

August 1998

Authors:

L. Dumas, J.-Y. Robic, Yves Pauleau

Keywords:

Electron Beam Evaporation, MgF₂, RBS, Residual Stress, X-Ray Characterization

Export:

RIS, BibTeX

Price:

$41.00

Permissions:

Request Permissions