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HomeMaterials Science ForumTrends and New Applications of Thin FilmsStructure, Composition and Residual Stresses of...

Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation

Abstract:

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Periodical:

Materials Science Forum (Volumes 287-288)

Main Theme:

Trends and New Applications of Thin Films

Edited by:

Horst Hoffmann

Pages:

255-258

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.255

Citation:

L. Dumas et al., "Structure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct Evaporation", Materials Science Forum, Vols. 287-288, pp. 255-258, 1998

Online since:

August 1998

Authors:

L. Dumas, J.-Y. Robic, Yves Pauleau

Keywords:

Electron Beam Evaporation, MgF₂, RBS, Residual Stress, X-Ray Characterization

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