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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Titanium Nitride - Silicon Nitride Composite...

Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

267-268

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.267

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Online since:

August 1998

Authors:

Jörg Patscheider, M Diserens, F. Lévy

Keywords:

Composite Coating, Reactive Magnetron Sputtering, Titanium Nitride-Silicon

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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