Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

267-268

DOI:

10.4028/www.scientific.net/MSF.287-288.267

Citation:

J. Patscheider et al., "Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering", Materials Science Forum, Vols. 287-288, pp. 267-268, 1998

Online since:

August 1998

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$35.00

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