Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

275-282

Citation:

M. Ye et al., "Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates", Materials Science Forum, Vols. 287-288, pp. 275-282, 1998

Online since:

August 1998

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