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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Residual Stress Evolution by the ex-situ Annealing...

Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

275-282

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.275

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Online since:

August 1998

Authors:

M. Ye, G. Berton, J-.L. Delplancke, M.-P. Delplancke, Luc Segers, R. Winand, K. De Bruyn

Keywords:

Annealing, Atomic Force Microscope (AFM), Residual Stress, Surface Morphology, TiN Film, X-Ray Diffraction (XRD)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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