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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Treatment of Materials in Radial Low-Pressure Arc...

Treatment of Materials in Radial Low-Pressure Arc Plasma Streams

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

295-298

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.295

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Online since:

August 1998

Authors:

I.I. Aksenov, V.M. Khoroshikh

Keywords:

Charge Exchange, Coating Deposition, Etching, Focusing, Ions, Magnetic Field, Nitriding, Radial Plasma Streams, Vacuum Arc Plasma Source

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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