Optical Emission Spectroscopy in High Target Powder Density Magnetron Source

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

311-314

Citation:

A. Brudnik et al., "Optical Emission Spectroscopy in High Target Powder Density Magnetron Source", Materials Science Forum, Vols. 287-288, pp. 311-314, 1998

Online since:

August 1998

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$38.00

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