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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Optical Emission Spectroscopy in High Target...

Optical Emission Spectroscopy in High Target Powder Density Magnetron Source

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

311-314

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.311

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Online since:

August 1998

Authors:

A. Brudnik, W. Posadowski, A. Czapla

Keywords:

DC Magnetron Sputtering, Emission Spectroscopy

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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