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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Several Ways to Modify Structural and...

Several Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive Sputtering

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

327-330

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.327

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Online since:

August 1998

Authors:

N. Martin, H. Madjoud, D. Baretti, Christophe Rousselot

Keywords:

Density, Optical Property, Reactive Sputtering, Titanium Oxide

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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