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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288High Current Metal-Ion Source for Activated...

High Current Metal-Ion Source for Activated Deposition

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

331-332

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.331

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Online since:

August 1998

Authors:

Th. Witke, P. Siemroth

Keywords:

Activated Deposition, Metal-Ion Source

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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