Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

323-326

DOI:

10.4028/www.scientific.net/MSF.287-288.323

Citation:

L.P. Sablev et al., "Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode", Materials Science Forum, Vols. 287-288, pp. 323-326, 1998

Online since:

August 1998

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$35.00

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