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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288Vacuum-Arc Evaporator of Metals with an Extended...

Vacuum-Arc Evaporator of Metals with an Extended Planar Cathode

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

323-326

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.323

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Online since:

August 1998

Authors:

L.P. Sablev, A.A. Andreev, V.V. Kunchenko, S.N. Grigoriev

Keywords:

Cathode Spot, Coating Profile, Evaporator, Planar Cathode, Position Sensors, Vacuum-Arc

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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