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HomeMaterials Science ForumMaterials Science Forum Vols. 287-288CVD Deposition and Characterisation of Highly...

CVD Deposition and Characterisation of Highly Conductive ZnO

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Periodical:

Materials Science Forum (Volumes 287-288)

Pages:

339-342

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.287-288.339

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Online since:

August 1998

Authors:

B. Hahn, M. Wörz, G. Heindel, E. Pschorr-Schoberer, W. Gebhardt

Keywords:

Chemical Vapor Deposition (CVD), Doping, PES, Valence Band Offsets, Zinc Oxide (ZnO)

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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