Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source

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Periodical:

Materials Science Forum (Volumes 287-288)

Edited by:

Horst Hoffmann

Pages:

303-306

DOI:

10.4028/www.scientific.net/MSF.287-288.303

Citation:

V.A. Belous and G.I. Nosov, "Ion Sputtering of Metals in a System with a Thermionic Inert Gas Plasma Source", Materials Science Forum, Vols. 287-288, pp. 303-306, 1998

Online since:

August 1998

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$35.00

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